A new method is proposed for correcting nonlinear spatial phase in gratings produced with spherical beam interference lithography. We suggest that a concave exposure surface can be used to compensate for the variations in interference angle and fringe inclination which lead to hyperbolic phase progression on a flat exposure plane. Experiments are shown using a spherical concave exposure surface that demonstrate the validity of the method.
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Walsh et al. (2001) studied this question.
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