This article presents a comparison of the results of simulation of optical coating deposition using a simplified simulator and a full simulator that takes into account the main error-causing factors of coating deposition and thickness control. For the simulators under consideration, the distributions of error vector norms in coating layer thicknesses, error correlation coefficients in layer thicknesses, and error self-compensation coefficients are found. It is shown that the simplified simulator makes it possible to obtain adequate results of evaluation of the deposition of real multilayer optical coatings and thus can be used for faster simulation of a large number of coatings with the subsequent analysis of their stability with respect to production errors.
No takes yet. Share an insight, caveat, or question.
Sharov et al. (2023) studied this question.
Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context: