Basic Study of Quantitative Ion Scattering Spectroscopy I Correction Factors for Quantification

Basic problems in quantification by ion scattering spectroscopy (ISS), i.e., energy dependence of the detection efficiency of a micro channel plate (MCP) and neutralization probabilities, have been studied using a newly constructed time of flight (TOF)-ISS apparatus. For primary ion energy below keV (1) marked dependence of the detection efficiency of MCP on the signal energy, and (2) strong contribution, to the ISS spectrum, of those neutral signals that are backscattered through the collision with the second or subsequent atomic layer atoms have been clearly revealed. It has also been pointed out that the energy dependence of the detection efficiency is described very well by a simple statistical treatment of secondary electron generation in the detector.