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March 1, 1979Japanese Journal of Applied Physics

Numerical Solution of Phosphorus Diffusion Equation in Silicon

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MYMasayuki YoshidaSumco Corporation (Japan)

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Masayuki Yoshida (1979) studied this question.

synapsesocial.com/papers/6a950b835f3b0bfa3be620a3https://doi.org/10.1143/jjap.18.479
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Synapse has enriched one closely related paper. Consider it for comparative context:

  1. 1Phosphorus Diffusion in Silicon Free from the Surface Effect under Extrinie Conditions1975 · 10 citations