Piezoelectric polymers have been for the fabrication of acoustic wave biosensors due to their light weight, low cost, and ease to form different shapes. This paper presents the design and resonance behavior of polyvinylidene fluoride (PVDF) diaphragms for biosensor applications. The phase spectra of the diaphragms were measured to determine the resonance behavior. The influence of boundary condition, excitation voltage and film thickness on the resonance behavior are discussed. After immobilizing the biological probe on gold surface, the diaphragms can be used for detecting target bio-molecules.
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Li et al. (2014) studied this question.
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