Diagonally Symmetric Form Ultrasonic Motor Using LiNbO3 Plate

An ultrasonic motor fabricated from a LiNbO 3 plate for high-speed revolution is presented. To obtain a high-speed motor, a large vibration velocity is required, and LiNbO 3 is suitable because it can maintain stable vibrational characteristics even when the vibration velocity exceeds 2 m/s. Additionally, a coupling mode in a diagonally symmetric form vibrator is introduced to realize a small single-phase motor. In this paper, we describe the experimental results for a LiNbO 3 plate ultrasonic motor whose revolution speed exceeds 5,000 rpm, which is obtained by the driving input voltage and power of 2 V rms and 34 mW, respectively. Moreover, to know the operating limit in terms of material strength, a finite element method analysis and experimental results are presented.