Turning of Micro-Structured Surfaces Based on a Fast Tool Servo System

This is the authors' abstract. We don't add key points for this paper.

A fast tool servo system is developed for the fabrication of micro-structured surface on a diamond turning machine. The fast tool servo (FTS) system in this investigation employs a piezoelectric actuator to actuate the diamond tool and a capacitance probe as the feed back sensor. To compensate the inherent nonlinear hysteresis behavior of the piezoelectric actuator, Proportional Integral (PI) closed loop control with a feed-forward predictor is implemented. The result of closed loop experiment in FTS demonstrates that the tracking error has been reduced to a level of less than 150nm. Actual experiment of fabricating the sinusoidal grid surface was performed on an ultra-precision diamond turning machine designed by Center of Precision Engineering of HIT. The fabrication of a sinusoidal grid surface has indicated the effectiveness of the fabrication system.