A new technique for the deposition of nickel metal films by gas-phase pyrolysis of nickel tetracarbonyl gas is described. A pulsed CO2 laser is used to form a reaction zone adjacent to a cold substrate, resulting in a rapidly quenched film. The technique relies on dielectric breakdown of a mixture of source and carrier gases and therefore lends itself to a variety of source gases and chemistries. Adherence data and compositional and structural analyses are presented.
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T. R. Jervis (1985) studied this question.
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