Fabrication of Nb-Doped TiO2 Transparent Conducting Films by Postdeposition Annealing under Nitrogen Atmosphere

This is the authors' abstract. We don't add key points for this paper.

Here, we report that highly conductive polycrystalline anatase Nb-doped TiO2 (TNO) thin films can be prepared via crystallization of amorphous precursors under N2 atmosphere. An optimized TNO film on a glass substrate exhibited a low resistivity of 8.4 ×10-4 Ω cm and an absorbance of 6% at a wavelength of 460 nm. These transport and optical properties were comparable to those of TNO films fabricated by vacuum annealing. This demonstrates the potential of TNO as an electrode for GaN-based light-emitting diodes.