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September 1, 2002IEEE Transactions on Microwave Theory and Techniques

A vertically integrated micromachined filter

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Authors

LHLee HarleMichigan State UniversityLKL.P.B. KatehiMitchell Institute

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Harle et al. (2002) studied this question.

synapsesocial.com/papers/6a955bf7cd4f73a2bd827f4dhttps://doi.org/10.1109/tmtt.2002.802317
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