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High-Rate Deposition of Intrinsic Amorphous Silicon Layers for Solar Cells Using Very High Frequency Plasma at Atmospheric Pressure, Kakiuchi, Hiroaki, Ohmi, Hiromasa, Kuwahara, Yasuhito, Matsumoto, Mitsuhiro, Ebata, Yusuke, Yasutake, Kiyoshi, Yoshii, Kumayasu, Mori, Yuzo
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Kakiuchi et al. (2006) studied this question.
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