A microwave excited non-equilibrium atmospheric pressure plasma source is developed and applied to chemical vapor deposition (CVD) of carbon nanotubes (CNTs). Multiwalled CNTs are successfully synthesized at a low temperature of 600°C by using mixtures of He/H 2 /CH 4 and He/H 2 /CF 4 . From gas phase observations, high H 2 dilution is found to be effective in the suppression of polymerization in the gas phase, thus contributing to CNTs growth on the catalyzed surface. This novel CVD system is has a great potential for the mass fabrication of CNTs.
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Matsushita et al. (2004) studied this question.
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