Metal Al Produced by H2 Plasma Reduction of AlCl3: A Thermodynamic and Kinetic Study on the Plasma Chemistry

In this paper we reported that low temperature plasma may reverse the direction of a chemical reaction. The thermodynamically forbidden reaction between H 2 and AlCl 3 was able to take place with the assistance of low temperature plasma, yielding metal Al. The plasma chemistry of the reaction was investigated by optical emission spectroscopy, which suggested that the dissociation of H 2 and AlCl 3 molecules by plasma led the reaction to a thermodynamically favorable one by creating reaction channels with low Gibbs free energy change. The addition of Ar promoted the reaction kinetics dramatically, which was attributed to the enhanced dissociation of AlCl 3 molecules by excited Ar species.