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November 1, 1990IBM Journal of Research and Development

Diamondlike carbon films by rf plasma-assisted chemical vapor deposition from acetylene

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Authors

AGA. GrillMicron (United States)BMB.S. MeyersonJohannes Kepler University of LinzVPV. PatelMcMaster University

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Grill et al. (1990) studied this question.

synapsesocial.com/papers/6aaf344575655d832af16a3chttps://doi.org/10.1147/rd.346.0849
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