Laser induced fluorescence of Cr atoms in their ground state have been used to characterize metallic sputtering in dc glow discharges (GDs) of hydrogen/argon admixtures in a stainless steel chamber at room temperature. A strong decrease in the sputtering signal was observed upon addition of H2 to the pure Ar GD plasma, at constant pressure and total current conditions, even at low H2 concentrations in the admixture. The plasma microscopic parameters have been determined from actinometry and Langmuir probe data. The H implantation characteristics of the studied plasmas were also determined by pump and release experiments. According to all the experimental evidence, hydrogen implantation in the metal surface is the main process responsible for the observed sputtering suppression. The results are compared to similar sputtering reduction observations previously reported in other light contaminant/metal systems.
No takes yet. Share an insight, caveat, or question.
Tabarés et al. (1996) studied this question.