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March 1, 1986Japanese Journal of Applied Physics

The Role of Hydrogen Radicals in the Growth of a-Si and Related Alloys

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SOShunri OdaThe University of TokyoSIShun-ichi IshiharaTokyo Institute of TechnologyNSNaoki ShibataTokyo Electron (Japan)

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Oda et al. (1986) studied this question.

synapsesocial.com/papers/6a958ecdcd4f73a2bd8282bfhttps://doi.org/10.1143/jjap.25.l188
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