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April 1, 2001Japanese Journal of Applied Physics

Capacitively Coupled Microplasma Source on a Chip at Atmospheric Pressure

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HYHiroyuki YoshikiYHYasuhiro HoriikeUniversity of Tsukuba

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Yoshiki et al. (2001) studied this question.

synapsesocial.com/papers/6a95a51a31a9d76dc0fbfcaehttps://doi.org/10.1143/jjap.40.l360
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