Electron Temperature Control in Inductively Coupled Nitrogen Plasmas by Adding Argon/Helium

A new technique, adding argon or helium into nitrogen plasma, has been used to regulate the electron temperature in an inductively coupled plasma. The electron temperature is determined by analysing the intensity ratio of two nitrogen spectrum lines. The results show that, when the total pressure is 0.7 Pa, the electron temperature increases with the increase of the He partial pressure in He/N 2 plasma, but the electron temperature decreases with the increase of the Ar partial pressure in Ar/N 2 plasma. The regulation effect of electron temperature is weaker in higher pressure N 2 /He plasma of 2.6 Pa.