Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation E. C. Samano, J. Camacho, R. Machorro; Optimal control on composition and optical properties of silicon oxynitride thin films. J. Vac. Sci. Technol. A 1 July 2005; 23 (4): 1228–1233. https://doi.org/10.1116/1.1864032 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology A Search Advanced Search |Citation Search
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Sámano et al. (2005) studied this question.
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