The use of high plasma density and low gas density, a recent trend in plasma-assisted materials processing, requires a particle simulation method for plasmas and gas flows. The kinetic theory basis of the particle simulation method is first described. Based on this theoretical viewpoint, state-of-the-art probabilistic treatments of collisions are described for electron-molecule, ion-molecule, molecule-molecule, and Coulomb collisions.
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K. Nanbu (2000) studied this question.
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