Instantaneous thickness measurement of multilayer films by single-shot angle-resolved spectral reflectometry

In this Letter, we describe a new, to the best of our knowledge, concept of angle-resolved spectral reflectometry with a pixelated polarizing camera for determination of the thickness of each film layer in multilayer films. We can measure the changes in the phase and amplitude of p- and s-polarized light over a broad spectral range and a wide incident angle at a time. The proposed method is verified by measuring a sample of multilayer film and comparing our measurement results with an ellipsometer. The comparison results show that our proposed technique enables real-time inspection of multilayer films with high precision.