Laser-induced forward transfer of TiO2–Au nanocomposite films for maskless patterning

Laser-induced forward transfer is investigated for maskless pattering of thin films. A 89TiO2–11Au (mol %) nanocomposite polycrystalline (100 nm thick) film fabricated by a sol-gel method shows a surface plasmon absorption produced by Au nanoclusters formed in the film. A second-harmonic generation sheet beam of a Q-switched Nd:YAG laser was irradiated on the film in air in contact with another glass substrate or with a 0.14 mm air gap. Regular stripe patterns of laser-induced transferred films were obtained. Transmittance spectra of laser-induced transferred films showed shifts of the surface plasmon absorption peak. Analysis of the spectra using the Mie scattering model revealed the porous character of transferred films.