Determining the distribution of silicon monofluoride on hydrofluoric acid-treated Si (111) surface by exchange reaction with molecules at the solid/liquid interface

Silicon monofluoride (Si–F) species on hydrofluoric acid (HF)-treated silicon surface have been shown to be quantitatively replaced by nucleophilic reagents at the solid/liquid interface, but some Si–F remain intact. The chemisorption of molecules with larger dimensions results in a decrease in the proportion of fluorine that is replaced. These results can be attributed to steric hindrance by the adsorbed molecules. This is explained by a model in which Si–F are grouped together to form islands of Si–F species on a predominantly H-terminated Si surface.