Incorporating compliant elastomers for jumping locomotion in microrobots

Small insects and other animals use a multitude of materials to realize specific functions, including locomotion.This paper demonstrates application of the first microfabrication process to incorporate high aspect ratio compliant elastomer structures in-plane with traditional silicon microelectromechanical systems (MEMS).By incorporating these new materials, compact energy storage systems based on elastomer springs for small jumping robots have been demonstrated.Results include a 4 mm × 4 mm jumping mechanism that has reached heights of 32 cm, × 80 its own height, and an on-chip actuated mechanism that has been used to propel a 1.4 mg projectile over 7 cm.