Interface Defects in HfO[sub 2], LaSiO[sub x], and Gd[sub 2]O[sub 3] High-k/Metal–Gate Structures on Silicon

Interface Defects in HfO2, LaSiO x , and Gd2O3 High-k/Metal–Gate Structures on Silicon, Hurley, P. K., Cherkaoui, K., O’Connor, E., Lemme, M. C., Gottlob, H. D. B., Schmidt, M., Hall, S., Lu, Y., Buiu, O., Raeissi, B., Piscator, J., Engstrom, O., Newcomb, S. B.