The nonlinear growth of periodic surface ripples in laser-induced etching of GaAs was investigated for different spatial periods below 200 nm. Growth gains of etched grooves were more than 5%/min at the above periods both experimentally and theoretically.
No takes yet. Share an insight, caveat, or question.
Kumagai et al. (1991) studied this question.
Synapse has enriched 5 related papers. Consider them for comparative context: