SrZrO 3 thin films grown by pulsed laser deposition on SrRuO 3 -buffered SrTiO 3 substrates have been investigated by means of x-ray diffraction, atomic force microscopy and Rutherford backscattering spectroscopy.The compressive stress originated in the coherent SrZrO 3 /SrRuO 3 interface due to the lattice mismatch (≈-4.5%)forces epitaxial SrZrO 3 to grow in a three-dimensional habit.So-deposited SrZrO 3 is used to fabricate nanoarrays of dielectric wires from a nanopatterned SrRuO 3 surface.The influence of the geometric shadowing effect produced by the non-perpendicular incidence of the ablated particles on the SrZrO 3 growth habit is discussed.
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Karthäuser et al. (2004) studied this question.
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