Three-dimensional off-lattice model for the interface growth of polycrystalline materials

A three-dimensional off-lattice model is developed to explain the interface evolution of polycrystalline materials grown under surface reaction control. The model includes random deposition and surface diffusion of depositing particles with energy barriers located at step edges and crystal boundaries. Depending on the height of the barriers existing at step edges and crystal boundaries, this model predicts either a scale-dependent or a scale-independent value of the growth exponent ({β}). Scale-dependent values of {β} reported for polycrystalline films grown under surface reaction control can be explained by the proposed model.