Silicon grating-based mirror for 13-μm polarized beams: matlab-aided design

A dielectric lamellar-grating layer-substrate structure is proposed to be capable, under some conditions, of acting as a 100% efficiency mirror when operated at fixed wavelengths and incidence angles. The design of such mirrors for 1.3 µm and near normal incidence is achieved with silicon as the grating-layer material and glass substrates of two types. The study is based on a new matrix-vector procedure for the solution of rigorous coupled-wave equations. The computations use MATLAB, and, in particular, its goal-attainment routine. Design parameter tolerances are also discussed.