High spatial frequency lamellar gratings are shown to function as phase compensators, quarter-wave and half-wave retarders, and polarization rotators that operate on specularly reflected (zeroth-order) beams. These gratings are designed using rigorous coupled-wave and modal grating diffraction theories. Controlling the geometrical parameters of these gratings allows for engineering the phase retardation and polarization conversion introduced to a reflected beam. Fabrication and operational tolerances for these elements are discussed. Wavelength and polar angle of incidence variation affect the performance of these elements more strongly than variations in other geometrical and operational parameters.
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Haggans et al. (1993) studied this question.
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