In situ mass measurement of electron-beam-induced nanometer-sized W-related deposits using a carbon nanotube cantilever

Using a carbon nanotube oscillator, the authors performed in situ measurements of densities of electron-beam-induced tungsten compounds with size of less than 100nm. Total mass of the deposit was proportional to the deposition time. A higher deposition rate was obtained at lower electron-beam acceleration voltage. Density of the deposit decreased from 2.7to1.4g∕cm3 with increasing acceleration voltage from 5to15kV. These results indicate that the increased density with low-acceleration voltage produces effective decomposition of W(CO)6.