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A review of the preparation of single source precursors (SSPs) to the group III metal nitrides (aluminum nitride, gallium nitride and indium nitride) is given. The SSPs are divided into three categories (1) volatile small molecules for chemical vapor deposition studies, (2) polymeric precursors for the formation of fibers and thin films, and (3) compounds developed for the formation of small-particle powders. The methods for conversion of the SSPs into the desired nitrides and the analysis of the resulting nitride materials are given whenever possible.
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Getman et al. (1995) studied this question.
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