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January 1, 2001Journal of Microelectromechanical Systems

A methodology and model for the pull-in parameters of electrostatic actuators

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Authors

YNY. NemirovskyTechnion – Israel Institute of TechnologyOBO. Bochobza-Degani

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Nemirovsky et al. (2001) studied this question.

synapsesocial.com/papers/6a96e724a43071aed1f6be8dhttps://doi.org/10.1109/84.967384
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