A High-Temperature Solar Selective Absorber Based upon Periodic Shallow Microstructures Coated by Multi-Layers Using Atomic Layer Deposition

Regarding the fabrication of solar selective absorbers, the ability to create microstructures on top of metal surfaces is a promising technology. Typically, these materials are able to possess spectrally-selective absorption properties for high-temperature usage. Solar-selective absorbers that function at temperatures up to 700 °C and possess shallow honeycomb cylindrical microcavities coated with a metal-dielectric multi-layer have been investigated. Honeycomb array cylindrical microcavities were fabricated on W substrate with interference lithography and multi-layers consisting of Pt nano-film sandwiched by Al2O3 layers were created for a uniform coating via atomic layer deposition. The absorbance spectrum of fabricated samples reveals results consistent with a simulation based on a rigorous coupled-wave analysis method. A solar absorbance value of 0.92 and a hemispherical total emittance value of 0.18 at 700 °C was determined from the fabricated solar-selective absorber. Additionally, thermal stability of up to 700 °C was confirmed in vacuum.