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Suppression of Crack Generation Using High-Compressive-Strain AlN/Sapphire Template for Hydride Vapor Phase Epitaxy of Thick AlN Film, Tsujisawa, Kenichi, Kishino, Shinya, Li, Da-Bing, Miyake, Hideto, Hiramatsu, Kazumasa, Shibata, Tomohiko, Tanaka, Mitsuhiro
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Tsujisawa et al. (2007) studied this question.
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