Fabrication of MgB2Nanowire Single-Photon Detector with Meander Structure

We report the fabrication of a MgB 2 nanowire single-photon detector (SSPD or SNSPD) with a meander structure and its optical response. In-situ passivation of AlN is quite effective for both protecting the MgB 2 surface from oxidation and from damage during the Ar ion milling process. Meander patterns of 10×10 µm 2 with the line widths between 225 to 135 nm are obtained without degradation. The meander with the line width of 135 nm exhibits the capacity for detecting single photons at λ= 1550 nm.