In order to determine the degree of contamination in the residual atmosphere above a commercial pump having a swept volume free of oil, mass spectrometry techniques have been employed. It has been demonstrated that fluorocarbon levels are at least 1000 times lower than for conventional rotary vane pumps lubricated with perfluoropolyether. A detailed study of a four-stage, 80 m3 /h dry pump has been made to gauge the effect of various operating techniques involving gas ballast, interstage pumping, and operation in conjunction with mechanical booster pumps. The suitability of such oil-free pumps for clean pumping applications is demonstrated.
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Wong et al. (1988) studied this question.