Photochemical Reaction of Ozone and 1,1,1,3,3,3-Hexamethyldisilazane: Analysis of the Gas Reaction between Precursors in a Photochemical Vapor Deposition Process

The photochemical reaction of 1,1,1,3,3,3-hexamethyldisilazane (HMDS) and ozone (O 3 ) in the gas phase was analyzed as the side reaction in the photochemical vapor deposition (photo-CVD) process irradiated by ultraviolet light: the analysis was conducted by Fourier-transform infrared absorption spectroscopy (FT-IR) and mass spectrometry (MS). The final products of this photochemical reaction between HMDS and O 3 are CO 2 , N 2 , and H 2 O, although this reaction is initiated at the Si–N–Si bond of HMDS with O 3 and ultraviolet (UV) light, thus producing, as a reaction intermediate, a compound with carbonyl and/or carboxylic group followed by Si–N–Si scission.