Effect of relative humidity on the tribological properties of hydrogenated diamond-like carbon films in a nitrogen environment

Hydrogenated diamond-like carbon (DLC) films were deposited on Si (100) wafers by a plasma enhanced chemical vapour deposition technique using CH 4 plus Ar as the feedstock. The friction and wear properties of the resulting films under different relative humidities, ranging from 5% to 100%, in a nitrogen environment, were measured using a ball-on-disc tribometer, with Si 3 N 4 balls as the counterparts. The friction surfaces of the films and Si 3 N 4 balls were observed on a scanning electron microscope, and investigated by x-ray photoelectron spectroscopy. The results showed that the friction coefficient increased continuously from 0.025 to 0.09 with increase in relative humidity from 5% to 100%, while the wear rate of the films sharply decreased and reached a minimum at a relative humidity of 40%, then it increased with further increase of the relative humidity. The interruption of the transferred carbon-rich layer on the Si 3 N 4 ball, and the friction-induced oxidation of the films at higher relative humidity were proposed as the main reasons for the increase in the friction coefficient. Moreover, the oxidation and hydrolysis of the Si 3 N 4 ball at higher relative humidity, leading to the formation of a tribochemical film, which mainly consists of silica gel, on the friction surface, are also thought to influence the friction and wear behaviour of the hydrogenated DLC films.