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Square‐spiral antenna‐coupled microbolometers made of gold and chrome are fabricated on a silicon‐nitride membrane. The membrane gives mechanical stability and thermal isolation to the detectors so that they can be used as picture elements in commercial infrared‐imaging systems. The fabricated devices are measured under room pressure and under vacuum, giving D* values of 3 × 106 cm√Hz /W and 1.7 × 107 cm√Hz /W, respectively. By using vanadium‐oxide, values well above 1 × 108 cm√Hz /W for D* can be obtained. Variations to the fabrication process that will allow the use of vanadium oxide are suggested.
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González et al. (2005) studied this question.
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