Energy harvesting is attractive for powering wireless sensors, especially in applications such as body sensor networks and pervasive sensing, where power source replacement or recharging is impractical. A MEMS (micro-electro-mechanical systems) electrostatic harvesting device suitable for body motion has been reported previously, using a rolling rod as the proof mass. A new rolling rod device is presented, employing a flexible substrate to allow the formation of a concave structure. Suitable rod confinement and increased rod–plate capacitance are achieved. Regular power transduction even under impulse motion excitation is reported, supplying 0.5 µW of output power.
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Kiziroglou et al. (2010) studied this question.
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