Samarium oxide films were prepared by vacuum thermal evaporation using tantalum boats. The effect of aging, frequency and annealing on capacitance and tan δ were studied for AlSm2O3Al capacitor structures. The variation in capacitance with frequency at low frequency region is quite considerable. The existence of oxygen vacancies were confirmed from the thermoluminescence studies of these oxide films. The results were discussed on the basis of oxygen vacancies existing in these films.
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Shekar et al. (1984) studied this question.
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