Reduced pressure chemical vapour deposition of SiGe virtual substrates for high mobility devices, J M Hartmann, Y Bogumilowicz, P Holliger, F Laugier, R Truche, G Rolland, M N Séméria, V Renard, E B Olshanetsky, O Estibals, Z D Kvon, J C Portal, L Vincent, F Cristiano, A Claverie
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Hartmann et al. (2003) studied this question.
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