The effect of specimen topography on x‐ray microanalysis element mapping was studied with an electron microprobe and a scanning electron microscope equipped for x‐ray detection. Using the lemma and palea of rice inflorescences as models, we determined that specimen topography can physically limit the detection of x‐rays and thus lead to erroneous element mapping data. Any geometrical point on a specimen interfering with a straight line from the point of excitation to the detector will cause an absorptive shadow area on the element map. Electrons impinging on a sample surface cause emissions to occur in all directions. Emissions with sufficient energy (x‐rays and backscattered electrons) can strike a topographical point different from the location of the focused electron beam, causing detectable x‐ray excitation. This phenomenon will also result in erroneous element map data. Methods of recognition of specimen topographical effects on x‐ray microanalysis are discussed.
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Hess et al. (1975) studied this question.
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