We report on the development of a microelectromechanical systems (MEMS)-scale photoacoustic sensor for the detection of trace gases. A mid-infrared quantum cascade laser (QCL) was used to determine detection limits for acetic acid, acetone, 1,4-dioxane, and vinyl acetate. The source was continuously tunable from 1015 cm(-1) to 1240 cm(-1), allowing for the collection of photoacoustic vibrational spectra for these gases. Exceptional agreement between the measured photoacoustic spectra and the infrared spectra for acetic acid, acetone, 1,4-dioxane, and vinyl acetate was observed. Partial least-squares (PLS) regression was used to develop an algorithm for classification of these compounds based solely on photoacoustic spectra.
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Holthoff et al. (2010) studied this question.
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