Diamond films synthesized by hot filament CVD were studied by SEM, X-ray diffraction, and Raman and XANES spectroscopies. All of these methods have confirmed that the films prepared at low methane concentrations (1.0 vol.% and 4.0 vol.% in H2) consist of diamond crystals. In contrast to these, the deposit at a high methane concentration (7.5 vol.%) does not provide an X-ray diffraction pattern or a Raman signal characteristic of diamond, indicating the absence of diamond crystals with long-range order. Nevertheless, the XANES spectrum revealed that this specimen is composed of small diamond clusters.
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Takata et al. (1989) studied this question.
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