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March 1, 1995Journal of Microelectromechanical Systems

Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives

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VTViktoria TemesvaryCalifornia Institute of TechnologySWShuyun WuCalifornia Institute of TechnologyWHW.H. HsiehCalifornia Institute of Technology

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Temesvary et al. (1995) studied this question.

synapsesocial.com/papers/6a980f6eed0046652d367441https://doi.org/10.1109/84.365366
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