Broadband CMOS Millimeter-Wave Frequency Multiplier With Vivaldi Antenna in 3-D Chip-Scale Packaging

This paper describes a frequency multiplier able to emit a broadband signal with a frequency range from 70 GHz up to at least 170 GHz. The device is composed of a nonlinear transmission line (NLTL) implemented in commercial CMOS 65-nm technology and an off-chip Vivaldi antenna. These two elements are packaged together with a 3-D chip-scale packaging technology. Characterization of the whole device and of the standalone NLTL is presented at frequencies up to 170 GHz.