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March 1, 2000Japanese Journal of Applied Physics

Gap Length Dependence of Electron Energy Distribution in Low-Pressure Ar Capacitively Coupled RF Discharges

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TKT. KimuraKyushu UniversityKKKouji Kaga Kouji KagaKOKazuyuki OheNagoya Institute of Technology

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Kimura et al. (2000) studied this question.

synapsesocial.com/papers/6a982352ce42e14121e18e28https://doi.org/10.1143/jjap.39.1351
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