This letter presents a suspended silicon-on-glass waveguide for broadband single-mode low-loss operation at terahertz frequencies. Measured attenuation constants of the two fabricated waveguides are 0.028 and 0.021 dB/λ0(on average) over the operation bandwidths of 420-500 GHz and 500-595 GHz, respectively. The fabrication technique of the waveguide is presented.
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Ranjkesh et al. (2018) studied this question.
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